One integrated circuit design calls for the diffusion of

One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2.5 x 1020 atoms/m3. The predeposition heat treatment is to be conducted at 1000째C for 45 minutes, with a constant surface concentration of 8 x 1026 As atoms/m3. At a drive-in treatment temperature of 1100째C, determine the diffusion time required for a junction depth of 1.2 m. For this system, values of Qd and D0 are 4.10eV and 2.29 x 10-3 m2/s, respectively.

One integrated circuit design calls for the diffusion of

One integrated circuit design calls for the diffusion of

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One integrated circuit design calls for the diffusion of

One integrated circuit design calls for the diffusion of

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